| 摘要 |
PROBLEM TO BE SOLVED: To prevent or inhibit terminal part from short-circuiting at the time of wafer test for a probe card in which a plurality of conductor terminals constituting the terminal part are arranged with a small pitch. SOLUTION: The probe card of this invention is constituted such that between the adjacent conductor terminals 6 a partition part 15 is provided on the laminated substrate 5. Thereby, even the tip of the probe 9 is brought into contact with the conductor terminals 6 during a wafer test, the shaved chip 31 is prevented or inhibited from bridging the adjacent conductor terminals 6, therefore the short circuit caused by the conduction between the terminals 6 is prevented or inhibited. Even if the shaved chip 31 is large enough to bridge the adjacent conductor terminals 6, the shaved chip 31 cannot be inserted into the clearance of the conductor terminals 6. Consequently, the shaved chip 31 can be easily removed. COPYRIGHT: (C)2007,JPO&INPIT
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