DRIBBLE FEEDING METHOD OF LIQUID MATERIAL

摘要

PROBLEM TO BE SOLVED: To provide a dribble feeding method of a liquid material which is capable of precisely feeding a very fine amount of the liquid material. SOLUTION: In the dribble feeding method of the liquid material which feeds the liquid material to an predetermined place of a substrate from a nozzle aperture 2 provided in a nozzle 1 wherein the nozzle 1 is arranged in the opposite side of the substrate, it comprises a first step of conducting the filling feeding of the liquid material to the nozzle aperture 2 from the opposite side of the discharge port of the nozzle aperture 2 by capillary phenomenon, a second step of scraping the liquid material 4 left at the opposite side to the discharging side of the nozzle aperture 2 when the liquid material can not be stored in the nozzle aperture 2 and carving a specified amount of the remaining liquid material 4 into the nozzle aperture 2 by surface-tension and a third step of dropping the specified amount of the liquid material 4 left in the nozzle aperture 2 to the substrate by external force. COPYRIGHT: (C)2007,JPO&INPIT