| 摘要 |
The invention relates to a scanning transmission electron microscope comprising an electron source (1) , an electron accelerator (4) and deflection means (5) for directing electrons emitted by the electron source at an object (2) to be examined, and in addition a detector (7) for detecting electrons coming from the object and, connected to the detector, a device for processing the detected electrons so as to form an object image, wherein a beam splitter (3) is provided for dividing the electron beam from the electron source into beamlets to be directed at the object to be examined, and wherein the detector is designed for the detection of separate electron patterns that correspond to said beamlets . |
