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发明名称
Kontrollierte Abkühlung von Zerstaubungstarget
摘要
申请公布号
DE602004004756(D1)
申请公布日期
2007.03.29
申请号
DE200460004756T
申请日期
2004.12.16
申请人
HERAEUS INC.
发明人
CHENG, YUANDA R.;RACINE, MICHAEL GENE;KENNEDY, STEVE ROGER;DEODUTT, ANAND S.
分类号
C23C14/34;H01L21/285
主分类号
C23C14/34
代理机构
代理人
主权项
地址
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