发明名称 CRUCIBLE FOR VACUUM EVAPORATION SYSTEM AND MANUFACTURING METHOD FOR ORGANIC EL DISPLAY USING THE SAME
摘要 PROBLEM TO BE SOLVED: To provide a crucible for the vacuum evaporation which is intended to be used for manufacturing an organic EL element with a uniform film thickness with high industrial efficiency. SOLUTION: The manufacturing method for an organic EL display uses a crucible, which has a surface roughness (Sm) of 50μm or more on its inner front surface, a shield lid with 0.2 or more holes per unit square mm, carbon content and oxygen content of 50 ppm or less respectively, and is made of molybdenum or molybdenum alloy with a blackening film formed on the external surface. COPYRIGHT: (C)2007,JPO&INPIT
申请公布号 JP2007080739(A) 申请公布日期 2007.03.29
申请号 JP20050268987 申请日期 2005.09.15
申请人 TOSHIBA CORP;TOSHIBA MATERIALS CO LTD 发明人 KASAMOTO MAKOTO
分类号 H05B33/10;C23C14/12;C23C14/24;H01L51/50 主分类号 H05B33/10
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