摘要 |
PROBLEM TO BE SOLVED: To provide a crucible for the vacuum evaporation which is intended to be used for manufacturing an organic EL element with a uniform film thickness with high industrial efficiency. SOLUTION: The manufacturing method for an organic EL display uses a crucible, which has a surface roughness (Sm) of 50μm or more on its inner front surface, a shield lid with 0.2 or more holes per unit square mm, carbon content and oxygen content of 50 ppm or less respectively, and is made of molybdenum or molybdenum alloy with a blackening film formed on the external surface. COPYRIGHT: (C)2007,JPO&INPIT
|