NANO-IMPRINT METHOD AND DEVICE

摘要

PROBLEM TO BE SOLVED: To form a circuit pattern on a transfer layer formed on a side surface of a cylindrical substrate by utilizing nano-imprint technology. SOLUTION: The method is characterized by transferring a pattern formed on the surface of a mold 104 to a transfer layer formed on a part or the whole of a side surface of a cylindrical or columner substrate 102. The device is characterized by having a first tool coming into contact with the substrate 102, a second tool rotatably supporting the first tool, a pressing part linked to the second tool and pressing the substrate to the mold 104, a movable holding part holding the mold 104 while moving the mold 104 in a direction nearly orthogonal to the pressing force. COPYRIGHT: (C)2007,JPO&INPIT