| 摘要 |
A rigid actuator arm is an appendage of a moveable drive plate that is coupled across at least one end of each of two deformable spring bars that are anchored at their opposite end to a support structure that keeps the end of the moveable drive plate that is not coupled to the to the deformable spring bars from touching the substrate. The moveable drive plate mates with an opposing fixed drive plate so that applying a potential difference between the moveable drive plate and the fixed drive plate causes the moveable drive plate to move toward the fixed drive plate with a rotation type motion. The rigid actuator arm likewise rotates about an axis that is through the point of attachment of the rigid actuator to the moveable drive plate. Consequently, the opposite end of the rigid actuator arm moves as well, with an amplification of the rotation motion.
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