NANO-IMPRINTING MOLD, DEVICE, AND METHOD

摘要

PROBLEM TO BE SOLVED: To provide a nano-imprinting device capable of high speed mold-release without breaking a pattern. SOLUTION: In a device for carrying out pattern transfer by pressing a mold 101 having a formed pattern to the liquid or viscous matter 401 containing a stress luminescent material arranged on a substrate 104, the mold-release starting point is created by an actuator 102 provided in the device. Further, a photosensor 402 for detecting the light generated by the stress change upon the mold-release is provided to detect the mold-release starting point and the mold-release starting timing to control the mold-release operation. COPYRIGHT: (C)2007,JPO&INPIT