| 摘要 |
PROBLEM TO BE SOLVED: To provide a composition for forming an insulation film good in such film characteristics as a dielectric constant, mechanical strength, etc. , being applied to an electronic device and the like; and to provide further an insulation film obtained by using the composition and an electronic device comprising the film. SOLUTION: The film-forming composition contains a compound composed of an alicyclic hydrocarbon structure and atoms selected from carbon, hydrogen, oxygen, nitrogen and halogen atoms. The above-mentioned compound has the shape of a particle with a particle diameter of 2-15 nm. The insulation film obtained by using the composition and the electronic device comprising the film are also provided. COPYRIGHT: (C)2007,JPO&INPIT
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