发明名称 DETERGENT
摘要 PROBLEM TO BE SOLVED: To provide a detergent used for cleaning an organic EL (electroluminescent) material sticking to a vacuum deposition apparatus, a metal mask, a crucible, etc., used when a display employing the organic EL material is produced, having excellent detergency with simple operation and slightly adversely affecting human bodies or the environment. SOLUTION: The detergent comprises a cyclic compound represented by formula (1) (wherein, R is a CH<SB>2</SB>or an O; and R' is an alkylene group which may have a substituent) such asε-caprolactone or propylene carbonate and dimethyl sulfoxide as a cleaning component. COPYRIGHT: (C)2007,JPO&INPIT
申请公布号 JP2007077301(A) 申请公布日期 2007.03.29
申请号 JP20050267867 申请日期 2005.09.15
申请人 TOKUYAMA CORP 发明人 KASAI MICHIFUMI;IWAMOTO HISAHIKO;INOUE YOSHIFUMI;NAKAJIMA MASAAKI
分类号 C11D7/26;C11D7/34;H01L51/50;H05B33/10 主分类号 C11D7/26
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