CHEMICAL VAPOR DEPOSITION APPARATUS INCLUDING SCREW MARKED WITH DEGREES AND INSTALLED TO EXTERNAL WALL OF PROCESS CHAMBER,申请号KR20050089166-传众专利搜索

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发明名称	CHEMICAL VAPOR DEPOSITION APPARATUS INCLUDING SCREW MARKED WITH DEGREES AND INSTALLED TO EXTERNAL WALL OF PROCESS CHAMBER
摘要
申请公布号	KR20070034701(A)	申请公布日期	2007.03.29
申请号	KR20050089166	申请日期	2005.09.26
申请人		发明人
分类号	H01L21/205	主分类号	H01L21/205
代理机构		代理人
主权项
地址

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