COMPOSITIONS AND METHODS FOR DRYING PATTERNED WAFERS DURING MANUFACTURE OF INTEGRATED CIRCUITRY PRODUCTS,申请号EP20040751653-传众专利搜索

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发明名称	COMPOSITIONS AND METHODS FOR DRYING PATTERNED WAFERS DURING MANUFACTURE OF INTEGRATED CIRCUITRY PRODUCTS
摘要
申请公布号	EP1765526(A1)	申请公布日期	2007.03.28
申请号	EP20040751653	申请日期	2004.05.07
申请人	ADVANCED TECHNOLOGY MATERIALS, INC.	发明人	XU, CHONGYING;KORZENSKI, MICHAEL;BAUM, THOMAS, H.;BOROVIK, ALEXANDER;GHENCIU, ELIODOR, G.
分类号	B08B3/00;B08B3/02;B08B3/10;B08B7/00	主分类号	B08B3/00
代理机构		代理人
主权项
地址

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