发明名称 PIEZOELECTRIC / ELECTROSTRICTIVE DEVICE AND METHOD OF MANUFACTURE THEREOF
摘要 A piezoelectric/electrostrictive device comprises a pair of mutually opposing thin plate sections (16a, 16b), a movable section (20), and a fixing section (22) for supporting the thin plate sections (16a, 16b) and the movable section (20). Piezoelectric/electrostrictive elements (24a, 24b) are arranged on at least one thin plate section (16a, 16b) of the pair of thin plate sections (16a, 16b). A hole (12) is formed by both inner walls of the pair of thin plate sections (16a and 16b), an inner wall (20a) of the movable section (20), and an inner wall (22a) of the fixing section (22). The piezoelectric/electrostrictive device has a mechanism (100) for restricting amplitude of the thin plate sections (16a, 16b). The mechanism (100) comprises a cavity portion (102) formed on the inner wall (20a) of the movable section (20) and a stopper member (104) provided on the inner wall (22a) of the fixing section (22), whose forward end (104a) enters the cavity portion (102). <IMAGE>
申请公布号 EP1139451(A4) 申请公布日期 2007.03.28
申请号 EP20000962963 申请日期 2000.09.29
申请人 NGK INSULATORS, LTD. 发明人 TAKEUCHI, YUKIHISA;NANATAKI, TSUTOMU;NAMERIKAWA, MASAHIKO;KIMURA, KOJI;SHIBATA, KAZUYOSHI
分类号 H01L41/083;H01L41/09;H01L41/187;H01L41/22;H01L41/338;H02N2/00 主分类号 H01L41/083
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