| 摘要 |
A method for transferring articles is provided to prevent the generation of bottleneck and to improve a wafer distributing process by distributing the wafers according to the order of priority using a robot. Articles are transferred between processing units by using a robot(300). Predetermined actions capable of being performed by the robot are determined. The predetermined actions are endowed with a major priority, so that the robot transfers the articles according to the order of the major priority between processing units. When the robot approaches the processing units according to the same order of the major priority, a minor priority is determined per each processing unit.
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