| 摘要 |
A laser induced thermal imaging method and a laser induced thermal imaging apparatus are provided to improve operation reliability of a device by preventing generation of particles or voids between a donor film and an acceptor substrate. A laser induced thermal imaging apparatus includes an acceptor substrate, a donor film, a pressing frame, and a laser generator(220). The laser generator is arranged on the donor film, so that the laser from the laser generator is irradiated on the donor film. The laser generator uses a CW(Continuous Wave) Nd:YAG(Neodymium:Yttrium-Aluminum-Garnet) laser and includes two galvanometer scanners(221,222), a scan lens(223), and a cylinder lens(224). The laser beam from the laser generator passes through a projection lens and reaches an upper surface of the donor film which is laminated on the acceptor substrate. |
