| 发明名称 |
METHOD FOR MANUFACTURING NANOSTRUCTURE AND NANOSTRUCTURE |
| 摘要 |
<p>A method of forming a nano-structure can form a fine pattern easily, and the nano-structure obtained by the method is provided. A method of forming a nano-structure comprising forming a thin film by a liquid phase adsorption on surface of a template formed on a substrate, and removing a portion of the thin film, and removing the template is used.</p> |
| 申请公布号 |
EP1767491(A1) |
申请公布日期 |
2007.03.28 |
| 申请号 |
EP20050751208 |
申请日期 |
2005.06.08 |
| 申请人 |
RIKEN |
发明人 |
FUJIKAWA, SHIGENORI;KUNITAKE, TOYOKI;HADA, HIDEO;OGATA, TOSHIYUKI |
| 分类号 |
B82B3/00;C01B33/12;G03F7/40;H01L21/027 |
主分类号 |
B82B3/00 |
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