DIELECTRIC BARRIER DISCHARGE EXCIMER LIGHT SOURCE,申请号KR20067020745-传众专利搜索

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发明名称	DIELECTRIC BARRIER DISCHARGE EXCIMER LIGHT SOURCE
摘要
申请公布号	KR20070034461(A)	申请公布日期	2007.03.28
申请号	KR20067020745	申请日期	2006.10.02
申请人		发明人
分类号	H01J65/00;H01J65/04;H01S3/038;H01S3/0971;H01S3/225	主分类号	H01J65/00
代理机构		代理人
主权项
地址

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