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发明名称
MULTI MODE INSPECTION METHOD AND APPARATUS
摘要
申请公布号
EP1766363(A2)
申请公布日期
2007.03.28
申请号
EP20050757570
申请日期
2005.07.04
申请人
NEGEVTECH LTD.
发明人
FURMAN, DOV;DOTAN, NOAM;MIKLATZKY, EFRAIM
分类号
G01N21/00
主分类号
G01N21/00
代理机构
代理人
主权项
地址
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