| 摘要 |
A reticle transfer apparatus is provided to reduce an occupational area and to decrease a reticle transfer time by detecting quickly the information on a reticle using a sensor unit composed of at least one or more sensors. A reticle transfer apparatus is used for transferring a reticle(15). The reticle transfer apparatus includes a gripping robot with a robot body(21) and a gripper part for holding the reticle, and a sensor unit. The sensor unit(40) is composed of a light source and at least one or more sensors. The light source is installed at one side of the robot body in order to generate a predetermined light toward the reticle. The sensors(43) are installed at the other side of the robot body in order to detect the predetermined light transmitted through the reticle. The gripping robot further includes a reflective mirror(50).
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