| 摘要 |
An exhausting apparatus is provided to prevent the contamination of a process chamber due to particles by restraining the particles adsorbed in a buffer space from being separated due to purge gas using a extended portion of a purge gas line through the buffer space. An exhausting apparatus includes a process chamber(200) having a sidewall with a silt, a pump, a connection port, an exhaust line and a purge gas line. The pump is connected through the slit of the process chamber in order to remove exhaust gas from the process chamber. The connection port is installed on the sidewall of the process chamber in order to cover the slit. The connection port has a buffer space for the exhaust gas. The exhaust line(220) is used for connecting the connection port with the pump. The purge gas line(230) is prolonged to the slit portion through the connection port in order to supply a purge gas into the process chamber.
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