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发明名称
Optical element, lithographic apparatus including such an optical element, device manufacturing method, and device manufactured thereby
摘要
An optical element including an anti-reflection (AR) coating is configured to reflect Extreme-Ultra-Violet (EUV) radiation only.
申请公布号
US7196343(B2)
申请公布日期
2007.03.27
申请号
US20040025851
申请日期
2004.12.30
申请人
ASML NETHERLANDS B.V.
发明人
VAN HERPEN MAARTEN MARINUS JOHANNES WILHELMUS;BAKKER LEVINUS PIETER;KLUNDER DERK JAN WILFRED
分类号
G03F7/20;G02B27/14
主分类号
G03F7/20
代理机构
代理人
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