SUBSTRATE TRANSFER SYSTEM CAPABLE OF TRANSFERRING SUBSTRATE SHEET BY SHEET, SUBSTRATE TRANSFER UNIT, AND STORAGE MEDIUM FOR STORING PROGRAM OF EXECUTING SUBSTRATE TRANSFER METHOD

摘要

A substrate transfer system includes a substrate storing apparatus for storing therein one or more substrates; at least one substrate processing apparatus for performing a predetermined processing on the substrate; and a substrate transfer apparatus for transferring the substrate by moving between the substrate storing apparatus and the substrate processing apparatus, the substrate transfer apparatus including at least one substrate transfer unit for supporting the substrate, unloading the substrate from the substrate storing apparatus or the substrate processing apparatus, and loading the substrate into the substrate storing apparatus of the substrate processing apparatus. The substrate transfer apparatus moves while supporting the substrate by the substrate transfer unit.