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发明名称
PLASMA FACILITY INCLUDING PLASMA ANALYZING UNIT USING SELF EXCITED ELECTRON PLASMA RESONANCE SPECTROSCOPY METHOD, AND PLASMA MONITORING METHOD
摘要
申请公布号
KR20070033767(A)
申请公布日期
2007.03.27
申请号
KR20050088285
申请日期
2005.09.22
申请人
发明人
分类号
H01L21/205
主分类号
H01L21/205
代理机构
代理人
主权项
地址
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