发明名称 |
Non-contact scanning apparatus using frequency response scheme and scanning method thereof |
摘要 |
An apparatus capable of tracking a sample surface level in a z direction and oscillating a cantilever at resonant frequency by using a frequency separation scheme in non-contact mode and method thereof. The inventive apparatus includes a sensing unit for sensing a sample surface; a frequency transforming unit for transforming the sensed signal; a frequency combining unit for combining signals; and an actuating unit for actuating the sensing unit.
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申请公布号 |
US7194897(B2) |
申请公布日期 |
2007.03.27 |
申请号 |
US20030651680 |
申请日期 |
2003.08.28 |
申请人 |
ELECTRONICS AND TELECOMMUNICATIONS RESEARCH INSTITUTE |
发明人 |
LEE SUNG Q;SONG KI BONG;PARK KANG HO;KIM JUN HO;KIM EUN KYOUNG;PARK KYI HWAN;YOUM WOO SUB |
分类号 |
G01B5/28;G01B21/30;G01Q10/00;G01Q10/04;G01Q10/06;G01Q60/18;G01Q60/22;G01Q60/24;G01Q60/32;G01Q60/38;G21K7/00 |
主分类号 |
G01B5/28 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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