发明名称 Non-contact scanning apparatus using frequency response scheme and scanning method thereof
摘要 An apparatus capable of tracking a sample surface level in a z direction and oscillating a cantilever at resonant frequency by using a frequency separation scheme in non-contact mode and method thereof. The inventive apparatus includes a sensing unit for sensing a sample surface; a frequency transforming unit for transforming the sensed signal; a frequency combining unit for combining signals; and an actuating unit for actuating the sensing unit.
申请公布号 US7194897(B2) 申请公布日期 2007.03.27
申请号 US20030651680 申请日期 2003.08.28
申请人 ELECTRONICS AND TELECOMMUNICATIONS RESEARCH INSTITUTE 发明人 LEE SUNG Q;SONG KI BONG;PARK KANG HO;KIM JUN HO;KIM EUN KYOUNG;PARK KYI HWAN;YOUM WOO SUB
分类号 G01B5/28;G01B21/30;G01Q10/00;G01Q10/04;G01Q10/06;G01Q60/18;G01Q60/22;G01Q60/24;G01Q60/32;G01Q60/38;G21K7/00 主分类号 G01B5/28
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