发明名称 |
Microfluidic device with controlled substrate conductivity |
摘要 |
A method to achieve controlled conductivity in microfluidic devices, and a device formed thereby. The method comprises forming a microchannel or a well in an insulating material, and ion implanting at least one region of the insulating material at or adjacent the microchannel or well to increase conductivity of the region.
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申请公布号 |
US7195986(B1) |
申请公布日期 |
2007.03.27 |
申请号 |
US20030384349 |
申请日期 |
2003.03.07 |
申请人 |
CALIPER LIFE SCIENCES, INC. |
发明人 |
BOUSSE LUC J.;STERN SETH R.;MCREYNOLDS RICHARD J. |
分类号 |
H01L21/331;B01L3/02;B32B5/02;H01L21/00;H01L21/04 |
主分类号 |
H01L21/331 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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