| 摘要 |
A flat zone aligning apparatus is provided to prevent the impact between a count sensor and a wafer in a wafer number detecting process by moving horizontally the count sensor using a predetermined moving part. A flat zone aligning apparatus includes a body and a count unit. The body(110) loads stably a carrier stored with a plurality of wafers. The body includes an alignment roller capable of aligning flat zones of the wafers. The count unit is installed at one side of the body. The count unit is composed of a count sensor and a predetermined moving part. The count sensor(170) detects the number of wafers. The predetermined moving part(160) is installed at one side of the count sensor in order to move horizontally the count sensor.
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