发明名称 METHOD FOR MANUFACTURING SEMICONDUCTOR DEVICE BY SEGMENTING DESIGN DATA IN MAIN SCANNING DIRECTION OF HEAD WHEN WIRING IS FORMED
摘要 <p>In the case of forming fine wires and the like by a droplet discharging apparatus to manufacture electric circuits, discharging controls including controls of a discharging position, a discharging timing, and the like are required to have very high accuracy. After forming design diagram data of an electric circuit by a CAD tool, the design diagram data is converted into first raster data, which is then converted into second raster data. The first raster data is a square grid regarding a dot pitch Xdp in a horizontal direction and a dot pitch Ydp in a perpendicular direction as one unit. The second raster data is a rectangular grid regarding the dot pitch Xdp in the horizontal direction and a dot pitch Ydp/V (V>1) as one unit. It is to be noted that arbitrary discharging number is the same before and after the conversion from the first raster data to the second raster data.</p>
申请公布号 KR20070033936(A) 申请公布日期 2007.03.27
申请号 KR20060092302 申请日期 2006.09.22
申请人 发明人
分类号 H01L29/786 主分类号 H01L29/786
代理机构 代理人
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