发明名称 An Apparatus Of Growing High Quality Silicon Single Crystalline Ingot, A Growing method Using The Same
摘要 A growing apparatus of a high quality silicon crystalline ingot and a growing method using the same are provided to increase a growth speed of the high quality silicon crystalline ingot by using a heater having a maximum caloric power at a specific position in a furnace. A furnace(20) is installed on an inner of a chamber(10) and contains a silicon solution. A heater(40) is installed at a side of the furnace to heat the silicon solution. The heater has a maximum caloric power at a specific position(Tp) in the furnace. A lifting unit lifts a silicon crystal grown from the silicon solution. The specific position of the maximum caloric power is formed corresponding to a position of 30mm over and 120mm below from a surface of the silicon solution.
申请公布号 KR20070033516(A) 申请公布日期 2007.03.27
申请号 KR20050087754 申请日期 2005.09.21
申请人 发明人
分类号 C30B15/00 主分类号 C30B15/00
代理机构 代理人
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