发明名称 Silicon package with integral heater
摘要 A hermetic package for electronic components which is made of metallic silicon is disclosed. The package includes a plurality of silicon elements which are bonded together. A metallic layer of platinum or gold is bonded to an internal surface of the hermetically sealed enclosure. While either metallic layer may serve as a heating element by subjecting the electronic circuit connected thereto with a large current, the platinum layer can also be used as a thermal sensor by passing a lower current there through. An internal heater is included to stabilize the performance of the electronic components.
申请公布号 US7196405(B1) 申请公布日期 2007.03.27
申请号 US20050156353 申请日期 2005.06.17
申请人 BLILEY TECHNOLOGIES INC. 发明人 FERREIRO PABLO;MARTIN KENNETH;CLINE JOHN
分类号 H01L23/02 主分类号 H01L23/02
代理机构 代理人
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