SHAPE ROUGHNESS MEASUREMENT IN OPTICAL METROLOGY,申请号KR20067026493-传众专利搜索

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发明名称	SHAPE ROUGHNESS MEASUREMENT IN OPTICAL METROLOGY
摘要
申请公布号	KR20070033997(A)	申请公布日期	2007.03.27
申请号	KR20067026493	申请日期	2006.12.15
申请人		发明人
分类号	G01B11/14;G01B11/24;G01B11/25	主分类号	G01B11/14
代理机构		代理人
主权项
地址

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