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发明名称
ULTRAVIOLET IRRADIATION APPARATUS AND LIGHT CLEANING APPARATUS USING INERT GAS ATMOSPHERE FORMING UNIT AND OXYGEN GAS ATMOSPHERE FORMING UNIT
摘要
申请公布号
KR20070033249(A)
申请公布日期
2007.03.26
申请号
KR20060077018
申请日期
2006.08.16
申请人
发明人
分类号
H01L21/304;G21K5/00;H01J65/00;H05B41/24
主分类号
H01L21/304
代理机构
代理人
主权项
地址
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