The system and method for detecting the variation of film on the way of dry etching,申请号KR20040116524-传众专利搜索

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发明名称	The system and method for detecting the variation of film on the way of dry etching
摘要
申请公布号	KR100698066(B1)	申请公布日期	2007.03.23
申请号	KR20040116524	申请日期	2004.12.30
申请人		发明人
分类号	H01L21/3065;H01L21/66	主分类号	H01L21/3065
代理机构		代理人
主权项
地址

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