| 摘要 |
An apparatus of a thin film evaporation and a method for evaporating a thin film using the same are provided to prevent a shadow phenomenon from being generated by not using a fine metal mask when forming an organic thin film on a substrate to implement a full-color. An apparatus of a thin film evaporation includes a vacuum chamber(26), a substrate holder(24), and an evaporation source(20). The vacuum chamber(26) maintains the inside thereof at a vacuum state. The substrate holder(24) supports a substrate(22) to deposit a deposition material(21) on the substrate(22) in the vacuum chamber(26). The evaporation source(20) is installed to face the substrate(22) and evaporates the deposition material(21) by heating the deposition material(21). And, the deposition source(20) further includes an ionization device for ionizing the deposition material(21) and a plurality of electric field generation devices(29a-29e) to separate the deposition material vapor ionized inside the deposition source(20) by an electric field.
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