发明名称 CONDUCTIVE BALL MOUNTING APPARATUS
摘要 PROBLEM TO BE SOLVED: To allow stable detection by judging presence of abnormal sticking balls from whether a current flows, by electrically connecting the lower end surface of a suction head to an abutting surface through a conduction detecting means to make the lower end surface approach the abutting surface up to a specified distance. SOLUTION: The conductive ball mounting apparatus employs following means. Firstly, the apparatus comprises a suction head, ball supplier, and work support, to mount a conductive ball sucked to the suction head at the ball supplier on the object of the work support. Secondary, the lower end surface of the suction head is formed from conductive material, and the abutting surface of conductive material parallel to the lower end surface is provided below the suction head. Thirdly, the lower end surface is vertically movable relative to the abutting surface. Fourthly, the lower end surface is electrically connected to the abutting surface through a conduction detecting means. Fifthly, a conductive ball abnormally sticking to the suction head is detected from whether a current flows by making the lower end surface approach the abutting surface upto a specified distance. COPYRIGHT: (C)2007,JPO&INPIT
申请公布号 JP2007073622(A) 申请公布日期 2007.03.22
申请号 JP20050256732 申请日期 2005.09.05
申请人 SHIBUYA KOGYO CO LTD 发明人 KAJII YOSHIHISA
分类号 H01L21/60 主分类号 H01L21/60
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