| 摘要 |
PROBLEM TO BE SOLVED: To provide a monolithic microwave integrated circuit having stable switching operation characteristics even though it is small, and also having a widely usable micro machine switch. SOLUTION: The micro-machine switch 5 of this monolithic microwave integrated circuit 1 is formed by a parallel flat plate structure composed of a stationary electrode 9 and a movable electrode 10 provided so as to face the stationary electrode 9, and the contact surfaces 9a, 10a of both electrodes 9, 10 are formed so as to have projecting and recessed parts which are engaged with each other. COPYRIGHT: (C)2007,JPO&INPIT
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