| 摘要 |
PROBLEM TO BE SOLVED: To provide a biaxial actuator capable of stable control. SOLUTION: The biaxial actuator comprises a movable shaft 22b provided with a control object on the distal end, a drive mechanism 40 for generating drive force for inclining the movable shaft 22b around a first axis P1 and a second axis P2 arranged orthogonally to each other, and a support mechanism 30 for supporting the movable shaft 22b to be inclined around the first axis P1 and/or the second axis P2 when receiving the drive force. The support mechanism 30 is provided with a fixed base 31, a first holder 32, a second holder 33, a first elastic member 35 connecting the fixed base 31 and the first holder 32, and a second elastic member 36 connecting the first holder 32 and the second holder 33. When defining an axis orthogonal to both of the first axis P1 and the second axis P2 as a third axis Z, the first elastic member 35 and the second elastic member 36 are arranged at positions orthogonal to each other around the third axis (Z axis). COPYRIGHT: (C)2007,JPO&INPIT
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