CAPACITANCE TYPE SENSOR AND ITS MANUFACTURING METHOD

摘要

PROBLEM TO BE SOLVED: To provide a capacitance type sensor that has a simple structure and is easily manufactured. SOLUTION: The capacitance type sensor comprises: a substrate that has two main facing surfaces and a first conductive type source region and a first conductive type drain region at a predetermined interval on one surface of them and uses a second conductive type region between the source region and drain region as a channel region; and a gate electrode plate facing the channel region. The gate electrode plate is disposed movably in one direction parallel to the surface of the channel region, and detects the force applied to the gate electrode plate based on variation of the facing area between the channel region and gate electrode plate. COPYRIGHT: (C)2007,JPO&INPIT