发明名称 METHOD FOR APPLYING A POROUS GLASS LAYER
摘要 The invention relates to a method for applying a porous glass layer. According to the invention, a porous glass layer is to be applied according to a PVD-method. The degree of porosity and average pore size can vary according to the process parameters, such as pressure and precipitation rate and by targeted addition of foreign bodies.
申请公布号 WO2007031317(A2) 申请公布日期 2007.03.22
申请号 WO2006EP08968 申请日期 2006.09.14
申请人 SCHOTT AG;OTTERMANN, CLEMENS;POMMEREHNE, JOERN 发明人 OTTERMANN, CLEMENS;POMMEREHNE, JOERN
分类号 C23C14/10;C03C17/00 主分类号 C23C14/10
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