发明名称 |
METHOD FOR APPLYING A POROUS GLASS LAYER |
摘要 |
The invention relates to a method for applying a porous glass layer. According to the invention, a porous glass layer is to be applied according to a PVD-method. The degree of porosity and average pore size can vary according to the process parameters, such as pressure and precipitation rate and by targeted addition of foreign bodies. |
申请公布号 |
WO2007031317(A2) |
申请公布日期 |
2007.03.22 |
申请号 |
WO2006EP08968 |
申请日期 |
2006.09.14 |
申请人 |
SCHOTT AG;OTTERMANN, CLEMENS;POMMEREHNE, JOERN |
发明人 |
OTTERMANN, CLEMENS;POMMEREHNE, JOERN |
分类号 |
C23C14/10;C03C17/00 |
主分类号 |
C23C14/10 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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