| 摘要 |
PROBLEM TO BE SOLVED: To provide a film bulk acoustic resonator capable of attaining improvement in resonance characteristics by suppressing to a minimum, the generation of standing waves caused by sonic waves of a traversal mode. SOLUTION: In a film bulk acoustic resonator comprising a resonating part A constituted by holding a piezoelectric film 3 between a 1st electrode 2 and a 2nd electrode 4, the resonating part A is constituted in a planar shape notching a part of an ellipse with a straight line L. The straight line L crosses at least one of, preferably both a short axis and a long axis of the ellipse and passes the center of the ellipse. COPYRIGHT: (C)2007,JPO&INPIT
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