| 摘要 |
PROBLEM TO BE SOLVED: To provide a vibrator which can demonstrate desired properties while making design and manufacture of the vibrator easy, and to provide a method of manufacturing a vibrator wherein yield in manufacturing the vibrator is reduced and cost reduction is attained. SOLUTION: This vibrator (micro resonator) is provided with a base part 2 and a moving part wherein transition is possible, having gap and countering to the base part 2. The vibrator is vibrated by driving the moving part. In the moving part, a removed part in which removing is performed by over etching is arranged on at least a part of an edge part of an end face of the base part 2 side. In the base part 2, a comb-shaped fixed electrode wherein a plurality number of plural electrode fingers 321 are arranged in parallel is fixed. In the moving part, a comb-shaped moving electrode wherein a plurality number of plural electrode fingers 421 are arranged in parallel is formed so as to bite the fixed electrode. It is desirable that a removed part 421a is formed on at least a part of each electrode finger 421 of the moving electrode. COPYRIGHT: (C)2007,JPO&INPIT
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