| 摘要 |
PROBLEM TO BE SOLVED: To provide an evaporation source of a compact and simple structure supplying steam of a high-melting-point heavy element of excellent purity. SOLUTION: The evaporation source is provided with a source material arrangement part of ion to arrange a source material of ion to be an object for heating in a non-contact state with the surroundings for generating steam for supplying outside, a steam delivery channel for delivering outside the steam generated from the source material of ion, a vacuum retention part maintaining the source material arrangement part of ion and the steam delivery channel in vacuum, a high-frequency coil arranged at an outer periphery of the source material of ion, and a high-frequency supply part supplying high frequencies for generating steam by directly heating the source material of ion. The evaporation source has a cylindrical heat shielding part serving as both the source material arrangement part of ion and the steam delivering channel by having the source material of ion arranged inside, and the high-frequency coil is spirally wound around an outer periphery of the heat shielding part along a length direction of the cylinder. COPYRIGHT: (C)2007,JPO&INPIT
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