| 摘要 |
PROBLEM TO BE SOLVED: To provide a bonded substrate, a bonding method, and a method for manufacturing a microreactor wherein the bonding accuracy of the anodic bonding between two glass substrates can be improved. SOLUTION: In the bonding method for bonding a first glass substrate 1 and a second glass substrate 2, a metal film 3 is formed on one surface of the first glass substrate 1, and the metal film 3 is contacted with the second glass substrate 2 so that the metal film 3 is exposed when a planar view is taken from the side of the second glass substrate 2. An anode 5 is contacted with the exposed metal film 3, a cathode 6 is contacted with the second glass substrate 2, and a voltage is applied to perform the anodic bonding between the first and second glass substrates 1 and 2. COPYRIGHT: (C)2007,JPO&INPIT
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