发明名称 OPTICAL ELEMENT UNIT
摘要 <p>Optical element unit comprising an optical element (8) and an optical element holder (11). The optical element holder comprises a holding element (12) and a plurality of first coupling elements (13), the holding element is holding the optical element and is made of a ceramic material. The first coupling elements are attached to the holding element and contacting the optical element. The first coupling elements provide deformation decoupling between the holding element and the optical element.</p>
申请公布号 WO2007031412(A1) 申请公布日期 2007.03.22
申请号 WO2006EP65891 申请日期 2006.08.31
申请人 CARL ZEIZZ SMT AG;SCHOEPPACH, ARMIN;RAU, JOHANNES 发明人 SCHOEPPACH, ARMIN;RAU, JOHANNES
分类号 G03F7/20;G02B7/02 主分类号 G03F7/20
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