| 摘要 |
<p>An air mount air pressure controlling apparatus of semiconductor exposure equipment and an air tank thereof are provided to uniformly maintain air pressure for mounting by attaching particles and foreign substances contained in air to an electromagnetic field partition wall in the air tank. An air supplying tube(40) forms a path for supplying high pressure air. A servo valve(42) is installed on the air supplying tube. The servo valve controls an air supply at certain intervals to reduce a pressure variation. Plural electromagnetic field partition walls(45) are installed on an air tank(44) to prevent vortex and turbulent air flowed through the servo valve. The air tank stores air. An air filter(46) filters impurity contained in the air supplied through the air tank. A restrictor(48) restricts a flow amount of the air whose impurity is filtered through the air filter. A control screw(50) controls pressure of the air supplied through the restrictor.</p> |
