| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a radiation sensitive resin composition having high resolution and a wide range of optimum exposure energy, and to provide a radiation sensitive acid generator used to prepare such a radiation sensitive resin composition having high resolution and a wide range of optimum exposure energy. <P>SOLUTION: The radiation sensitive resin composition contains (A) an alkali-insoluble or slightly alkali-soluble resin which has an acid dissociable group and becomes alkali-soluble when the acid dissociable group dissociates and (B) a radiation sensitive acid generator, wherein the acid generator (B) contains (B-1) a sulfonimide compound, (B-2) an iodonium salt and (B-3) a sulfonium salt. <P>COPYRIGHT: (C)2007,JPO&INPIT |
