| 摘要 |
PROBLEM TO BE SOLVED: To provide an inspection device capable of evaluating a height of a protrusion part on a color filter substrate at an absolute value, capable of shortening an inspection time, and capable of reducing a cost of the device. SOLUTION: This inspection device is provided with: a laser beam source 3 capable of maintaining a prescribed height with respect to one main face of the color filter substrate 2, and for emitting a laser beam 4 in parallel to the one main face of the color filter substrate 2; an area sensor 5 faced to the laser beam source 3 with the color filter substrate 2 therebetween, and for receiving the laser beam 4; a moving table 1 for moving at least either of the color filter substrate 2, or a set of the laser beam source 3 and the area sensor 5, to scan the one main face of the color filter substrate 2 sequentially by the laser beam source 3, a storage part 7 for storing a photoreception amount of the laser beam 4; and a determination part 8 for determining the presence of the protrusion part 6 of the prescribed height or more on the color filter substrate 2, based on the photoreception amount. COPYRIGHT: (C)2007,JPO&INPIT
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