发明名称 |
Pattern inspection method and apparatus with high-accuracy pattern image correction capability |
摘要 |
A high-accuracy image correction device adaptable for use in pattern inspection apparatus is disclosed. The device includes a correction region designation unit which designates a correction region including a pattern and its nearby portion within each of an inspection reference pattern image and a pattern image under test. The device also includes an equation generator which generates by linear predictive modeling a set of simultaneous equations for a reference pattern image within the correction region and an under-test pattern image within the correction region, a parameter generator for solving the equations to obtain more than one model parameter, and a corrected pattern image generator for using the model parameter to apply the linear predictive modeling to the reference pattern image to thereby generate a corrected pattern image. A pattern inspection method using the image correction technique is also disclosed.
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申请公布号 |
US2007064994(A1) |
申请公布日期 |
2007.03.22 |
申请号 |
US20060360657 |
申请日期 |
2006.02.24 |
申请人 |
OAKI JUNJI;HARABE NOBUYUKI |
发明人 |
OAKI JUNJI;HARABE NOBUYUKI |
分类号 |
G06K9/00;G03F1/84 |
主分类号 |
G06K9/00 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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