发明名称 REPEATABLE HEAT-TREATING METHODS AND APPARATUS
摘要 A first heat-treating method involves monitoring at least one thermal efficiency parameter associated with an irradiance system configured to produce an irradiance flash incident on a surface of a workpiece, and automatically updating control information used by the irradiance system to produce the irradiance flash, in response to the monitoring of the thermal efficiency parameter. A second method involves predicting a heating effect of an irradiance flash to be incident upon a surface of a workpiece, in response to a measurement of a heating parameter of the surface, and pre-adjusting the irradiance flash, in response to the predicted heating effect. A third method involves measuring a temperature of a surface of a workpiece during an initial portion of an irradiance flash incident on the surface, and controlling a power of a remaining portion of the irradiance flash, in response to the temperature.
申请公布号 WO2007030941(A1) 申请公布日期 2007.03.22
申请号 WO2006CA01518 申请日期 2006.09.14
申请人 MATTSON TECHNOLOGY CANADA, INC.;CAMM, DAVID, MALCOLM;DETS, SERGIY;MCDONNELL, KEVIN;STUART, GREG;THRUM, TILMAN;RUDIC, IGOR;KALUDJERCIC, LJUBOMIR 发明人 CAMM, DAVID, MALCOLM;DETS, SERGIY;MCDONNELL, KEVIN;STUART, GREG;THRUM, TILMAN;RUDIC, IGOR;KALUDJERCIC, LJUBOMIR
分类号 G05D23/19;B01J19/12;H01L21/324;H01L21/66 主分类号 G05D23/19
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