DEPOSITION PREVENTING PLATE FOR FILM FORMING APPARATUS, AND FILM FORMING APPARATUS

摘要

A deposition preventing plate for film forming apparatus, especially one in which low-defect film formation is demanded, that is capable of avoiding the cause of film defect attributed to detachment of film from a deposition preventing plate with a film attached thereto in a film forming apparatus and incorporation of the detached film in a film forming substrate or a film formed on the substrate; and a relevant film forming apparatus. There is provided a deposition preventing plate capable of preventing film attachment to structures within a film forming apparatus, characterized in that an outer face of folded part obtained by folding an edge portion of deposition preventing plate, or vicinity of edge portion of deposition preventing plate, to the back consists of a curved surface with a curvature radius greater than 1/2 of the thickness of the deposition preventing plate.