| 发明名称 |
WATER-BASED POLISHING PAD HAVING IMPROVED ADHESION PROPERTY AND A MANUFACTURING METHOD OF THE SAME FOR DECREASING THE PAD-TO-PAD DEVIATION BY SHAPING AN WEB |
| 摘要 |
The polishing pad (300) comprises a polymeric matrix dispersed with microspheres, applied on a permeable substrate (302). The polymeric matrix is formed from water-based polymer or its blends. An independent claim is included for manufacture of polishing pad.
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| 申请公布号 |
KR20070032609(A) |
申请公布日期 |
2007.03.22 |
| 申请号 |
KR20060089922 |
申请日期 |
2006.09.18 |
| 申请人 |
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发明人 |
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| 分类号 |
B24D11/00;B24D99/00;B24B37/24;H01L21/304 |
主分类号 |
B24D11/00 |
| 代理机构 |
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代理人 |
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| 主权项 |
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| 地址 |
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